Grazing Incidence Small- and Wide-Angle X-ray Scattering
Thin samples, or thin samples deposited on substrates, may require reflection geometry as opposed to standard transmission geometry. Typical samples for GISAXS/WAXS are polymer thin films, mineral precipitates, pattern directed self-assemblies, deposited on solid substrates.
GISAXS measurements use the Pilatus 2M detector. Typical camera length is 2m and the in-plane Qmax is up to 0.3-0.4 A^-1. A PerkinElmer detector (XRpad 4343F) is employed for GIWAXS measurements. The detector is located about 18cm away from the sample, and detecting Q range is ~0.4 – 10 A^-1.
At 12-ID-B, GISAXS and GIWAXS are available independently (not simultaneously) with different detectors and setups. Typically, samples are run in air and at room temperature using a holder built for individual or multiple samples. Common substrates are silicon wafer, glass, and other substrates with smooth surface.
Grazing incidence measurements use vertically focused beam on a sample. The vertical beam can be tuned from 0.10 to 0.02mm using a CRL set at the far upstream. The vertical beam size at this beamline is normally focused to 0.02-0.03mm for GISAXS and GIWAXS measurements. The horizontal beam size is about 0.10-0.14mm.
Note: To make the sample alignment easy, the recommended substrate size is: ~10mm (length) x 5-10mm (width) x ~1mm(thickness).